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Micromachines, Volume 15, Issue 5 (May 2024) – 96 articles

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13 pages, 11282 KiB  
Article
Carbon Nanotube-Based Printed All-Organic Microelectrode Arrays for Neural Stimulation and Recording
by Tatsuya Murakami, Naoki Yada and Shotaro Yoshida
Micromachines 2024, 15(5), 650; https://doi.org/10.3390/mi15050650 (registering DOI) - 14 May 2024
Abstract
In this paper, we report a low-cost printing process of carbon nanotube (CNT)-based, all-organic microelectrode arrays (MEAs) suitable for in vitro neural stimulation and recording. Conventional MEAs have been mainly composed of expensive metals and manufactured through high-cost and complex lithographic processes, which [...] Read more.
In this paper, we report a low-cost printing process of carbon nanotube (CNT)-based, all-organic microelectrode arrays (MEAs) suitable for in vitro neural stimulation and recording. Conventional MEAs have been mainly composed of expensive metals and manufactured through high-cost and complex lithographic processes, which have limited their accessibility for neuroscience experiments and their application in various studies. Here, we demonstrate a printing-based fabrication method for microelectrodes using organic CNT/paraffin ink, coupled with the deposition of an insulating layer featuring single-cell-sized sensing apertures. The simple microfabrication processes utilizing the economic and readily available ink offer potential for cost reduction and improved accessibility of MEAs. Biocompatibility of the fabricated microelectrode was suggested through a live/dead assay of cultured neural cells, and its large electric double layer capacitance was revealed by cyclic voltammetry that was crucial for preventing cytotoxic electrolysis during electric neural stimulation. Furthermore, the electrode exhibited sufficiently low electric impedance of 2.49 Ω·cm2 for high signal-to-noise ratio neural recording, and successfully captured model electric waves in physiological saline solution. These results suggest the easily producible and low-cost printed all-organic microelectrodes are available for neural stimulation and recording, and we believe that they can expand the application of MEA in various neuroscience research. Full article
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16 pages, 5029 KiB  
Article
Broadening Bandwidth in a Semi-Active Vibration Absorption System Utilizing Stacked Polyvinyl Chloride Gel Actuators
by Zhuoyuan Li, Chen Liu, Meiping Sheng, Minqing Wang, Hualing Chen, Bo Li and Peng Xia
Micromachines 2024, 15(5), 649; https://doi.org/10.3390/mi15050649 - 14 May 2024
Abstract
Plasticized polyvinyl chloride (PVC) gel is a new soft and smart material, whose potential in electroactive variable stiffness can be used for vibration control in soft robotic systems. In this paper, a new semi-active vibration absorber is developed by stacking PVC gel actuator [...] Read more.
Plasticized polyvinyl chloride (PVC) gel is a new soft and smart material, whose potential in electroactive variable stiffness can be used for vibration control in soft robotic systems. In this paper, a new semi-active vibration absorber is developed by stacking PVC gel actuator units. The absorption bandwidth of a single PVC gel absorber covers the range of three natural frequencies (76.5 Hz, 95 Hz, 124 Hz) of a rectangular steel plate in vibration attenuation. The maximum reduction percentage in acceleration amplitude is 63%. With stacked PVC gel actuator units, the absorption bandwidth can be shifted and obviously broadened. Full article
(This article belongs to the Special Issue Soft Actuators: Design, Fabrication and Applications)
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12 pages, 1859 KiB  
Article
Modeling and Reliability Analysis of MEMS Gyroscope Rotor Parameters under Vibrational Stress
by Lei Wang, Yuehong Pan, Kai Li, Lilong He, Qingyi Wang and Weidong Wang
Micromachines 2024, 15(5), 648; https://doi.org/10.3390/mi15050648 - 14 May 2024
Viewed by 110
Abstract
Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the [...] Read more.
Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the working principle of MEMS gyroscope rotors and investigated how vibration affects their parameters. Focusing on zero bias and scale factor as key performance indicators, we developed an accelerated degradation model using the distributional assumption method. We then collected degradation data for these parameters under various vibration conditions. Using the Copula function, we established a reliability assessment approach to evaluate the degradation of the MEMS gyroscope rotor’s zero bias and scale factor under vibration, enabling the determination of reliability for these parameters. Experimental findings confirmed that increasing stress levels lead to reduced failure times and increased failure rates for MEMS gyroscope rotors, with significant changes observed in the zero bias parameter. Our evaluation method effectively characterizes changes in the reliability of the MEMS gyroscope rotor’s scale factor and zero bias over time, providing valuable information for practical applications of MEMS gyroscopes. Full article
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13 pages, 3028 KiB  
Article
Integrative BNN-LHS Surrogate Modeling and Thermo-Mechanical-EM Analysis for Enhanced Characterization of High-Frequency Low-Pass Filters in COMSOL
by Jorge Davalos-Guzman, Jose L. Chavez-Hurtado and Zabdiel Brito-Brito
Micromachines 2024, 15(5), 647; https://doi.org/10.3390/mi15050647 - 13 May 2024
Viewed by 277
Abstract
This paper pioneers a novel approach in electromagnetic (EM) system analysis by synergistically combining Bayesian Neural Networks (BNNs) informed by Latin Hypercube Sampling (LHS) with advanced thermal–mechanical surrogate modeling within COMSOL simulations for high-frequency low-pass filter modeling. Our methodology transcends traditional EM characterization [...] Read more.
This paper pioneers a novel approach in electromagnetic (EM) system analysis by synergistically combining Bayesian Neural Networks (BNNs) informed by Latin Hypercube Sampling (LHS) with advanced thermal–mechanical surrogate modeling within COMSOL simulations for high-frequency low-pass filter modeling. Our methodology transcends traditional EM characterization by integrating physical dimension variability, thermal effects, mechanical deformation, and real-world operational conditions, thereby achieving a significant leap in predictive modeling fidelity. Through rigorous evaluation using Mean Squared Error (MSE), Maximum Learning Error (MLE), and Maximum Test Error (MTE) metrics, as well as comprehensive validation on unseen data, the model’s robustness and generalization capability is demonstrated. This research challenges conventional methods, offering a nuanced understanding of multiphysical phenomena to enhance reliability and resilience in electronic component design and optimization. The integration of thermal variables alongside dimensional parameters marks a novel paradigm in filter performance analysis, significantly improving simulation accuracy. Our findings not only contribute to the body of knowledge in EM diagnostics and complex-environment analysis but also pave the way for future investigations into the fusion of machine learning with computational physics, promising transformative impacts across various applications, from telecommunications to medical devices. Full article
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10 pages, 3219 KiB  
Article
Evaluation of Phototoxicity of Short-Wavelength Laser Light Utilizing PCNA Accumulation
by Tetsuya Matsuyama, Noboru Osaka, Mikiya Yamaguchi, Naohiro Kanamaru, Kenji Wada, Ai Kawakita, Kaori Murata, Kenji Sugimoto and Koichi Okamoto
Micromachines 2024, 15(5), 646; https://doi.org/10.3390/mi15050646 - 13 May 2024
Viewed by 168
Abstract
In recent years, diseases such as age-related macular degeneration and retinal pigment degeneration caused by excessive exposure to short-wavelength visible light have become significant concerns. With the aim of quantitatively evaluating the toxicity of short-wavelength light, proliferating cell nuclear antigen (PCNA) accumulation at [...] Read more.
In recent years, diseases such as age-related macular degeneration and retinal pigment degeneration caused by excessive exposure to short-wavelength visible light have become significant concerns. With the aim of quantitatively evaluating the toxicity of short-wavelength light, proliferating cell nuclear antigen (PCNA) accumulation at the irradiation site was investigated using live cell imaging techniques to irradiate individual living cells with short-wavelength laser light. By examining the dependency of PCNA accumulation on the irradiation site within the cells and their cell cycle, it was observed that PCNA accumulation occurred only when the cell nucleus of cells in the S phase of the cell cycle was irradiated. We investigated the accumulation of PCNA at the laser irradiation site using laser light at wavelengths of 405 nm and 375 nm, with intensities ranging from 0.5 μW to 9.0 μW. The results confirmed an increase in PCNA accumulation with increasing intensity, and a higher accumulation was observed with laser light irradiation at a wavelength of 375 nm compared to 405 nm. By comparing the PCNA accumulation and 24 h cell viability, we demonstrated the feasibility of quantitatively assessing laser light toxicity through the measurement of PCNA accumulation. Full article
(This article belongs to the Special Issue Ultraviolet Devices and Ultraviolet Germicidal Irradiation)
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11 pages, 6055 KiB  
Article
Miniaturized and High Volumetric Energy Density Power Supply Device Based on a Broad-Frequency Vibration Driven Triboelectric Nanogenerator
by Liting Wu, Zewei Ren, Yanjun Wang, Yumin Tang, Zhong Lin Wang and Rusen Yang
Micromachines 2024, 15(5), 645; https://doi.org/10.3390/mi15050645 - 13 May 2024
Viewed by 351
Abstract
The widespread vibration is one of the most promising energy sources for IoT and small sensors, and broad-frequency vibration energy harvesting is important. Triboelectric nanogenerators (TENGs) can convert vibration energy into electrical energy through triboelectricity and electrostatic induction, providing an effective solution to [...] Read more.
The widespread vibration is one of the most promising energy sources for IoT and small sensors, and broad-frequency vibration energy harvesting is important. Triboelectric nanogenerators (TENGs) can convert vibration energy into electrical energy through triboelectricity and electrostatic induction, providing an effective solution to the collection of broad-frequency vibration energy. Also, the power supply in constrained and compact spaces has been a long-standing challenge. Here, a miniaturized power supply (MPS) based on a broad-frequency vibration-driven triboelectric nanogenerator (TENG) is developed. The size of the MPS is 38 mm × 26 mm × 20 mm, which can adapt to most space-limited environments. The TENG device is optimized through theoretical mechanical modeling for the external stimuli, it can efficiently harvest vibrational energy in the frequency range of 1–100 Hz and has a high output power density of 134.11 W/cm3. The developed device demonstrates its practical application potential in powering small electronics like LEDs, watches, and timers. Full article
(This article belongs to the Special Issue Emerging Applications of Triboelectric Effects/Materials)
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7 pages, 4175 KiB  
Communication
A High-Energy, Wide-Spectrum, Spatiotemporal Mode-Locked Fiber Laser
by Boyuan Ge, Yajun Lou, Silin Guo, Yue Cai and Xinhai Zhang
Micromachines 2024, 15(5), 644; https://doi.org/10.3390/mi15050644 - 12 May 2024
Viewed by 222
Abstract
In this article, we demonstrate a high-energy, wide-spectrum, spatiotemporal mode-locked (STML) fiber laser. Unlike traditional single-mode fiber lasers, STML fiber lasers theoretically enable mode-locking with various combinations of transverse modes. The laser can deliver two different STML pulse sequences with different pulse widths, [...] Read more.
In this article, we demonstrate a high-energy, wide-spectrum, spatiotemporal mode-locked (STML) fiber laser. Unlike traditional single-mode fiber lasers, STML fiber lasers theoretically enable mode-locking with various combinations of transverse modes. The laser can deliver two different STML pulse sequences with different pulse widths, spectra and beam profiles, due to the different compositions of transverse modes in the output pulses. Moreover, we achieve a wide-spectrum pulsed output with a single-pulse energy of up to 116 nJ, by weakening the spectral filtering and utilizing self-cleaning. Strong spatial and spectral filtering are usually thought to be necessary for achieving STML. Our experiment verifies the necessity of spatial filtering for achieving STML, and we show that weakening unnecessary spectral filtering provides an effective way to increase the pulse energy and spectrum width of mode-locked fiber lasers. Full article
(This article belongs to the Special Issue Fiber Lasers and Applications)
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3 pages, 142 KiB  
Editorial
Editorial for the Special Issue on Advanced Interconnect and Packaging, 2nd Edition
by Dawei Wang and Wensheng Zhao
Micromachines 2024, 15(5), 643; https://doi.org/10.3390/mi15050643 - 11 May 2024
Viewed by 208
Abstract
Interconnect and packaging technologies are crucial aspects of modern electronics, and they are essential to achieve high performance, miniaturization and low power consumption of electronic equipment [...] Full article
(This article belongs to the Special Issue Advanced Interconnect and Packaging, 2nd Edition)
15 pages, 4129 KiB  
Article
Research on Single-Event Burnout Reinforcement Structure of SiC MOSFET
by Qiulan Liao and Hongxia Liu
Micromachines 2024, 15(5), 642; https://doi.org/10.3390/mi15050642 - 10 May 2024
Viewed by 199
Abstract
In this paper, the single-event burnout (SEB) and reinforcement structure of 1200 V SiC MOSFET (SG-SBD-MOSFET) with split gate and Schottky barrier diode (SBD) embedded were studied. The device structure was established using Sentaurus TCAD, and the transient current changes of single-event effect [...] Read more.
In this paper, the single-event burnout (SEB) and reinforcement structure of 1200 V SiC MOSFET (SG-SBD-MOSFET) with split gate and Schottky barrier diode (SBD) embedded were studied. The device structure was established using Sentaurus TCAD, and the transient current changes of single-event effect (SEE), SEB threshold voltage, as well as the regularity of electric field peak distribution transfer were studied when heavy ions were incident from different regions of the device. Based on SEE analysis of the new structural device, two reinforcement structure designs for SEB resistance were studied, namely the expansion of the P+ body contact area and the design of a multi-layer N-type interval buffer layer. Firstly, two reinforcement schemes for SEB were analyzed separately, and then comprehensive design and analysis were carried out. The results showed that the SEB threshold voltage of heavy ions incident from the N+ source region was increased by 16% when using the P+ body contact area extension alone; when the device is reinforced with a multi-layer N-type interval buffer layer alone, the SEB threshold voltage increases by 29%; the comprehensive use of the P+ body contact area expansion and a multi-layer N-type interval buffer layer reinforcement increased the SEB threshold voltage by 33%. Overall, the breakdown voltage of the reinforced device decreased from 1632.935 V to 1403.135 V, which can be seen as reducing the remaining redundant voltage to 17%. The device’s performance was not significantly affected. Full article
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18 pages, 9637 KiB  
Article
Design and Analysis of 5-DOF Compact Electromagnetic Levitation Actuator for Lens Control of Laser Cutting Machine
by Chuan Zhao, Qinwei Zhang, Wenzhe Pei, Junjie Jin, Feng Sun, Hongkui Zhang, Ran Zhou, Dongning Liu, Fangchao Xu, Xiaoyou Zhang and Lijian Yang
Micromachines 2024, 15(5), 641; https://doi.org/10.3390/mi15050641 - 10 May 2024
Viewed by 194
Abstract
In laser beam processing, the angle or offset between the auxiliary gas and the laser beam axis have been proved to be two new process optimization parameters for improving cutting speed and quality. However, a traditional electromechanical actuator cannot achieve high-speed and high-precision [...] Read more.
In laser beam processing, the angle or offset between the auxiliary gas and the laser beam axis have been proved to be two new process optimization parameters for improving cutting speed and quality. However, a traditional electromechanical actuator cannot achieve high-speed and high-precision motion control with a compact structure. This paper proposes a magnetic levitation actuator which could realize the 5-DOF motion control of a lens using six groups of differential electromagnets. At first, the nonlinear characteristic of a magnetic driving force was analyzed by establishing an analytical model and finite element calculation. Then, the dynamic model of the magnetic levitation actuator was established using the Taylor series. And the mathematical relationship between the detected distance and five-degree-of-freedom was determined. Next, the centralized control system based on PID control was designed. Finally, a driving test was carried out to verify the five-degrees-of-freedom motion of the proposed electromagnetic levitation actuator. The results show it can achieve a stable levitation and precision positioning with a desired command motion. It also proves that the proposed magnetic levitation actuator has the potential application in an off-axis laser cutting machine tool. Full article
(This article belongs to the Special Issue Recent Advances in Electromagnetic Devices)
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17 pages, 2359 KiB  
Review
LDH-Based Voltammetric Sensors
by Domenica Tonelli, Matteo Tonelli, Stefano Gianvittorio and Andreas Lesch
Micromachines 2024, 15(5), 640; https://doi.org/10.3390/mi15050640 - 10 May 2024
Viewed by 261
Abstract
Layered double hydroxides (LDHs), also named hydrotalcite-like compounds, are anionic clays with a lamellar structure which have been extensively used in the last two decades as electrode modifiers for the design of electrochemical sensors. These materials can be classified into LDHs containing or [...] Read more.
Layered double hydroxides (LDHs), also named hydrotalcite-like compounds, are anionic clays with a lamellar structure which have been extensively used in the last two decades as electrode modifiers for the design of electrochemical sensors. These materials can be classified into LDHs containing or not containing redox-active centers. In the former case, a transition metal cation undergoing a reversible redox reaction within a proper potential window is present in the layers, and, therefore, it can act as electron transfer mediator, and electrocatalyze the oxidation of an analyte for which the required overpotential is too high. In the latter case, a negatively charged species acting as a redox mediator can be introduced into the interlayer spaces after exchanging the anion coming from the synthesis, and, again, the material can display electrocatalytic properties. Alternatively, due to the large specific surface area of LDHs, molecules with electroactivity can be adsorbed on their surface. In this review, the most significant electroanalytical applications of LDHs as electrode modifiers for the development of voltammetric sensors are presented, grouping them based on the two types of materials. Full article
(This article belongs to the Special Issue Advances in Voltammetric Sensors)
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26 pages, 24565 KiB  
Review
A Review of Femtosecond Laser Processing of Silicon Carbide
by Quanjing Wang, Ru Zhang, Qingkui Chen and Ran Duan
Micromachines 2024, 15(5), 639; https://doi.org/10.3390/mi15050639 - 10 May 2024
Viewed by 351
Abstract
Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and [...] Read more.
Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and modification, making them ideal for SiC processing. In this review, we aim to provide an overview of the process properties, progress, and applications by discussing the various methodologies involved in femtosecond laser processing of SiC. These methodologies encompass direct processing, composite processing, modification of the processing environment, beam shaping, etc. In addition, we have explored the myriad applications that arise from applying femtosecond laser processing to SiC. Furthermore, we highlight recent advancements, challenges, and future prospects in the field. This review provides as an important direction for exploring the progress of femtosecond laser micro/nano processing, in order to discuss the diversity of processes used for manufacturing SiC devices. Full article
(This article belongs to the Special Issue Recent Advances in Micro/Nano-Fabrication)
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18 pages, 6136 KiB  
Article
An Electronically Reconfigurable Highly Selective Stop-Band Ultra-Wideband Antenna Applying Electromagnetic Bandgaps and Positive-Intrinsic-Negative Diodes
by Anees Abbas, Niamat Hussain, Md. Abu Sufian, Wahaj Abbas Awan, Jaemin Lee and Nam Kim
Micromachines 2024, 15(5), 638; https://doi.org/10.3390/mi15050638 - 9 May 2024
Viewed by 236
Abstract
In this article, an ultra-wideband (UWB) antenna featuring two reconfigurable quasi-perfect stop bands at WLAN (5.25–5.75 GHz) and lower 5G (3.4–3.8 GHz) utilizing electromagnetic bandgaps (EBGs) and positive-intrinsic-negative (P-I-N) diodes is proposed. A pair of EBG structures are applied to generate sharp notch [...] Read more.
In this article, an ultra-wideband (UWB) antenna featuring two reconfigurable quasi-perfect stop bands at WLAN (5.25–5.75 GHz) and lower 5G (3.4–3.8 GHz) utilizing electromagnetic bandgaps (EBGs) and positive-intrinsic-negative (P-I-N) diodes is proposed. A pair of EBG structures are applied to generate sharp notch bands in the targeted frequency spectrum. Each EBG creates a traditional notch, while two regular notches are combined to make a quasi-perfect, sharp, notch band. Four P-I-N diodes are engraved into the EBG structures to enable notch band reconfigurability. By switching the operational condition of the four diodes, the UWB antenna can dynamically adjust its notching characteristics to enhance its adaptability to various communication standards and applications. The antenna can be reconfigured as a UWB (3–11.6 GHz) without any notch band, a UWB with a single sharp notch (either at WLAN or 5G), or a UWB with two quasi-perfect notch bands. Moreover, the antenna’s notch bands can also be switched from a traditional notch to a quasi-perfect notch and vice versa. To confirm the validity of the simulated outcomes, the proposed reconfigurable UWB antenna is fabricated and measured. The experimental findings are aligned closely with simulation results, and the antenna offers notch band reconfigurability. The antenna shows a consistently favorable radiation pattern and gain. The dimension of the presented antenna is 20 × 27 × 1.52 mm3 (0.45 λc × 0.33 λc × 0.025 λc, where λc is the wavelength in free space). Full article
(This article belongs to the Special Issue Microwave Passive Components, 2nd Edition)
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12 pages, 21037 KiB  
Article
Grooving and Absorption on Substrates to Reduce the Bulk Acoustic Wave for Surface Acoustic Wave Micro-Force Sensors
by Yang Feng, Haoda Yu, Wenbo Liu, Keyong Hu, Shuifa Sun, Zhen Yang and Ben Wang
Micromachines 2024, 15(5), 637; https://doi.org/10.3390/mi15050637 - 9 May 2024
Viewed by 262
Abstract
Improving measurement accuracy is the core issue with surface acoustic wave (SAW) micro-force sensors. An electrode transducer can stimulate not only the SAW but also the bulk acoustic wave (BAW). A portion of the BAW can be picked up by the receiving transducer, [...] Read more.
Improving measurement accuracy is the core issue with surface acoustic wave (SAW) micro-force sensors. An electrode transducer can stimulate not only the SAW but also the bulk acoustic wave (BAW). A portion of the BAW can be picked up by the receiving transducer, leading to an unwanted or spurious signal. This can harm the device’s frequency response characteristics, thereby potentially reducing the precision of the micro-force sensor’s measurements. This paper examines the influence of anisotropy on wave propagation, and it also performs a phase-matching analysis between interdigital transducers (IDTs) and bulk waves. Two solutions are shown to reduce the influence of BAW for SAW micro sensors, which are arranged with acoustic absorbers at the ends of the substrate and in grooving in the piezoelectric substrate. Three different types of sensors were manufactured, and the test results showed that the sidelobes of the SAW micro-force sensor could be effectively inhibited (3.32 dB), thereby enhancing the sensitivity and performance of sensor detection. The SAW micro-force sensor manufactured using the new process was tested and the following results were obtained: the center frequency was 59.83 MHz, the fractional bandwidth was 1.33%, the range was 0–1000 mN, the linearity was 1.02%, the hysteresis was 0.59%, the repeatability was 1.11%, and the accuracy was 1.34%. Full article
(This article belongs to the Special Issue Recent Advances in SAW Resonators)
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17 pages, 6669 KiB  
Article
Understanding the Effect of Dispersant Rheology and Binder Decomposition on 3D Printing of a Solid Oxide Fuel Cell
by Man Yang, Santosh Kumar Parupelli, Zhigang Xu and Salil Desai
Micromachines 2024, 15(5), 636; https://doi.org/10.3390/mi15050636 - 9 May 2024
Viewed by 235
Abstract
Solid oxide fuel cells (SOFCs) are a green energy technology that offers a cleaner and more efficient alternative to fossil fuels. The efficiency and utility of SOFCs can be enhanced by fabricating miniaturized component structures within the fuel cell footprint. In this research [...] Read more.
Solid oxide fuel cells (SOFCs) are a green energy technology that offers a cleaner and more efficient alternative to fossil fuels. The efficiency and utility of SOFCs can be enhanced by fabricating miniaturized component structures within the fuel cell footprint. In this research work, the parallel-connected inter-digitized design of micro-single-chamber SOFCs (µ-SC-SOFCs) was fabricated by a direct-write microfabrication technique. To understand and optimize the direct-write process, the cathode electrode slurry was investigated. Initially, the effects of dispersant Triton X-100 on LSCF (La0.6Sr0.2Fe0.8Co0.2O3-δ) slurry rheology was investigated. The effect of binder decomposition on the cathode electrode lines was evaluated, and further, the optimum sintering profile was determined. Results illustrate that the optimum concentration of Triton X-100 for different slurries was around 0.2–0.4% of the LSCF solid loading. A total of 60% of solid loading slurries had high viscosities and attained stability after 300 s. In addition, 40–50% solid loading slurries had relatively lower viscosity and attainted stability after 200 s. Solid loading and binder affected not only the slurry’s viscosity but also its rheology behavior. Based on the findings of this research, a slurry with 50% solid loading, 12% binder, and 0.2% dispersant was determined to be the optimal value for the fabricating of SOFCs using the direct-write method. This research work establishes guidelines for fabricating the micro-single-chamber solid oxide fuel cells by optimizing the direct-write slurry deposition process with high accuracy. Full article
(This article belongs to the Special Issue Recent Advances in Micro/Nano-Fabrication)
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19 pages, 15054 KiB  
Article
Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution
by Enfu Li and Jiaying Jian
Micromachines 2024, 15(5), 635; https://doi.org/10.3390/mi15050635 - 9 May 2024
Viewed by 273
Abstract
A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution of the time domain sensor is equal to the time-measurement accuracy divided by the sensor sensitivity. Combined with the sensitivity formula, the acceleration resolution [...] Read more.
A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution of the time domain sensor is equal to the time-measurement accuracy divided by the sensor sensitivity. Combined with the sensitivity formula, the acceleration resolution is proportional to the vibration amplitude, the time-measurement accuracy, and the third power of the resonant frequency. According to the available time-measurement accuracy and the desired acceleration resolution, the parameters including the vibration amplitude and the resonant frequency were theoretically calculated. The geometrical configuration of the time domain sensor device was designed based on the calculated parameters. Then, the designed device was fabricated based on a standard silicon-on-insulator process and a matched interface circuit was developed for the fabricated device. Experimental results demonstrated that the design methodology is effective and feasible. Moreover, the implemented sensor works well. In addition, the acceleration resolution can be tuned by adjusting the time-measurement accuracy and the vibration amplitude. All the reported results of this work can be expanded to other time domain inertial sensors, e.g., a gyroscope or tilt sensor. Full article
(This article belongs to the Special Issue Micro and Smart Devices and Systems, 3rd Edition)
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9 pages, 2226 KiB  
Article
Resonance Modes of Water Drops Pinned to a Vibrating Rectangular Post
by Paolo Sartori, Davide Ferraro, Matteo Pierno and Giampaolo Mistura
Micromachines 2024, 15(5), 634; https://doi.org/10.3390/mi15050634 - 9 May 2024
Viewed by 313
Abstract
We studied the effects of vertical vibrations on a water drop that was pinned to the sharp edges of a rectangular post. By varying the frequency and amplitude of the vertical displacement, distinct resonance peaks were observed using a simple optical technique. The [...] Read more.
We studied the effects of vertical vibrations on a water drop that was pinned to the sharp edges of a rectangular post. By varying the frequency and amplitude of the vertical displacement, distinct resonance peaks were observed using a simple optical technique. The vibrational spectra of the first two modes exhibited two closely spaced peaks, which corresponded to standing waves that exist along the major and minor contour lengths of the drops. The values of the resonance frequencies can be explained rather well by a simple model, which was originally proposed for axially symmetric drops. Full article
(This article belongs to the Section A:Physics)
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15 pages, 4414 KiB  
Article
Ti3AlC2 MAX Phase Modified Screen-Printed Electrode for the Fabrication of Hydrazine Sensor
by Khursheed Ahmad, Waseem Raza and Rais Ahmad Khan
Micromachines 2024, 15(5), 633; https://doi.org/10.3390/mi15050633 - 9 May 2024
Viewed by 265
Abstract
Hydrazine is considered a powerful reducing agent and catalyst, showing diverse applications in agricultural industries, toxic degradation research, and wastewater management. Additionally, hydrazine can trigger some specific reactions when combined with suitable oxidants. Due to its highly polar nature, hydrazine can easily dissolve [...] Read more.
Hydrazine is considered a powerful reducing agent and catalyst, showing diverse applications in agricultural industries, toxic degradation research, and wastewater management. Additionally, hydrazine can trigger some specific reactions when combined with suitable oxidants. Due to its highly polar nature, hydrazine can easily dissolve in alcohol, water, and various other polar solvents. Therefore, it can be extensively utilized in different areas of application and industries such as rocketry and various chemical applications. Despite its beneficial properties, hydrazine is unstable, posing significant risk due to its highly toxic nature. It is extremely hazardous to both human health and the environment. It can cause various illnesses and symptoms such as dizziness, temporary blindness, damage to the central nervous system, and even death when inhaled in sufficient quantities. Therefore, it is highly important to monitor the level of hydrazine to prevent its toxic and hazardous effects on human beings and the environment. In the present study, we discuss the simple fabrication of a disposable cost-effective and eco-friendly hydrazine sensor. We used a screen-printed carbon electrode, i.e., SPCE, as a base for the construction of a hydrazine sensor. The Ti3AlC2 MAX has been used as a suitable and efficient electrode material for the fabrication of disposable hydrazine sensors. We modified the active surface of the SPCE using a drop-casting approach. The resulting Ti3AlC2 MAX modified SPCE (Ti3AlC2@SPCE) has been utilized as an efficient and low-cost hydrazine sensor. Cyclic voltammetry, i.e., CV, and linear sweep voltammetry, viz., LSV, was employed as a sensing technique in this study. The optimization of pH and electrode material loading was conducted. The Ti3AlC2@SPCE exhibited excellent sensing performance toward hydrazine oxidation. A reasonable detection limit (0.01 µM) was achieved for hydrazine sensing. The fabricated sensor also demonstrated a reasonable linear range of 1–50 µM. This work provides the design and fabrication of simple disposable Ti3AlC2@SPCE as a suitable electrode for the determination of hydrazine using LSV technology. Full article
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13 pages, 5714 KiB  
Article
Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes
by Pierre Balage, Manon Lafargue, Théo Guilberteau, Guillaume Bonamis, Clemens Hönninger, John Lopez and Inka Manek-Hönninger
Micromachines 2024, 15(5), 632; https://doi.org/10.3390/mi15050632 - 9 May 2024
Viewed by 542
Abstract
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst [...] Read more.
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication, Second Edition)
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17 pages, 9599 KiB  
Article
Integrated LSPR Biosensing Signal Processing Strategy and Visualization Implementation
by Mixing Zhou and Zhaoxin Geng
Micromachines 2024, 15(5), 631; https://doi.org/10.3390/mi15050631 - 8 May 2024
Viewed by 278
Abstract
The LSPR biosensor chip is a groundbreaking tool popular in laboratory settings for identifying disease markers. However, its use in clinical environments is not as widespread. One notable gap is the lack of a universal signal processing tool for LSPR biosensing. To escalate [...] Read more.
The LSPR biosensor chip is a groundbreaking tool popular in laboratory settings for identifying disease markers. However, its use in clinical environments is not as widespread. One notable gap is the lack of a universal signal processing tool for LSPR biosensing. To escalate its precision, there is an emerging need for software that not only optimizes signal processing but also incorporates self-verification functionalities within LSPR biochemical sensors. Enter the visual LSPR sensor software—an innovative platform that processes real-time transmission or reflection spectra. This advanced software adeptly captures the nuanced structural changes at the nanostructure interface prompted by environmental fluctuations. It diligently records and computes a suite of parameters, including the resonance wavelength shift, full width at half maximum, sensitivity, and quality factor. These features empower users to tailor processing algorithms for each data capture session. Transcending traditional instruments, this method accommodates a multitude of parameters and ensures robust result validation while tactfully navigating nanostructure morphology complexities. Forsaking third-party tool dependencies, the software tackles challenges of precision and cost-effectiveness head-on, heralding a significant leap forward in nanophotonics, especially for high-throughput LSPR biosensing applications. This user-centric innovation marks substantial progress in biochemical detection. It is designed to serve both researchers and practitioners in the field of nanophotonic sensing technology, simplifying complexity while enhancing reliability and efficiency. Full article
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18 pages, 3472 KiB  
Review
Recent Advances in Microfluidic-Based Extracellular Vesicle Analysis
by Jiming Chen, Meiyu Zheng, Qiaoling Xiao, Hui Wang, Caixing Chi, Tahui Lin, Yulin Wang, Xue Yi and Lin Zhu
Micromachines 2024, 15(5), 630; https://doi.org/10.3390/mi15050630 - 8 May 2024
Viewed by 436
Abstract
Extracellular vesicles (EVs) serve as vital messengers, facilitating communication between cells, and exhibit tremendous potential in the diagnosis and treatment of diseases. However, conventional EV isolation methods are labor-intensive, and they harvest EVs with low purity and compromised recovery. In addition, the drawbacks, [...] Read more.
Extracellular vesicles (EVs) serve as vital messengers, facilitating communication between cells, and exhibit tremendous potential in the diagnosis and treatment of diseases. However, conventional EV isolation methods are labor-intensive, and they harvest EVs with low purity and compromised recovery. In addition, the drawbacks, such as the limited sensitivity and specificity of traditional EV analysis methods, hinder the application of EVs in clinical use. Therefore, it is urgent to develop effective and standardized methods for isolating and detecting EVs. Microfluidics technology is a powerful and rapidly developing technology that has been introduced as a potential solution for the above bottlenecks. It holds the advantages of high integration, short analysis time, and low consumption of samples and reagents. In this review, we summarize the traditional techniques alongside microfluidic-based methodologies for the isolation and detection of EVs. We emphasize the distinct advantages of microfluidic technology in enhancing the capture efficiency and precise targeting of extracellular vesicles (EVs). We also explore its analytical role in targeted detection. Furthermore, this review highlights the transformative impact of microfluidic technology on EV analysis, with the potential to achieve automated and high-throughput EV detection in clinical samples. Full article
(This article belongs to the Special Issue Application of Microfluidic Technology in Bioengineering)
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17 pages, 1566 KiB  
Review
Micro-Scale Particle Tracking: From Conventional to Data-Driven Methods
by Haoyu Wang, Liu Hong and Leonardo P. Chamorro
Micromachines 2024, 15(5), 629; https://doi.org/10.3390/mi15050629 - 8 May 2024
Viewed by 375
Abstract
Micro-scale positioning techniques have become essential in numerous engineering systems. In the field of fluid mechanics, particle tracking velocimetry (PTV) stands out as a key method for tracking individual particles and reconstructing flow fields. Here, we present an overview of the micro-scale particle [...] Read more.
Micro-scale positioning techniques have become essential in numerous engineering systems. In the field of fluid mechanics, particle tracking velocimetry (PTV) stands out as a key method for tracking individual particles and reconstructing flow fields. Here, we present an overview of the micro-scale particle tracking methodologies that are predominantly employed for particle detection and flow field reconstruction. It covers various methods, including conventional and data-driven techniques. The advanced techniques, which combine developments in microscopy, photography, image processing, computer vision, and artificial intelligence, are making significant strides and will greatly benefit a wide range of scientific and engineering fields. Full article
(This article belongs to the Special Issue Advanced Micro-/Nano-Manipulation and Positioning Techniques)
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13 pages, 6617 KiB  
Article
A Soft Robot Tactile Finger Using Oxidation-Reduction Graphene–Polyurethane Conductive Sponge
by Hangze Li, Chaolin Ma, Jinmiao Chen, Haojie Wang, Xiao Chen, Zhijing Li and Youzhi Zhang
Micromachines 2024, 15(5), 628; https://doi.org/10.3390/mi15050628 - 7 May 2024
Viewed by 298
Abstract
Currently, intelligent robotics is supplanting traditional industrial applications. It extends to business, service and care industries, and other fields. Stable robot grasping is a necessary prerequisite for all kinds of complex application scenarios. Herein, we propose a method for preparing an elastic porous [...] Read more.
Currently, intelligent robotics is supplanting traditional industrial applications. It extends to business, service and care industries, and other fields. Stable robot grasping is a necessary prerequisite for all kinds of complex application scenarios. Herein, we propose a method for preparing an elastic porous material with adjustable conductivity, hardness, and elastic modulus. Based on this, we design a soft robot tactile fingertip that is gentle, highly sensitive, and has an adjustable range. It has excellent sensitivity (~1.089 kpa−1), fast response time (~35 ms), and measures minimum pressures up to 0.02 N and stability over 500 cycles. The baseline capacitance of a sensor of the same size can be increased by a factor of 5–6, and graphene adheres better to polyurethane sponge and has good shock absorption. In addition, we demonstrated the application of the tactile fingertip to a two-finger manipulator to achieve stable grasping. In this paper, we demonstrate the great potential of the soft robot tactile finger in the field of adaptive grasping for intelligent robots. Full article
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15 pages, 3393 KiB  
Article
Experimental Investigation on Ultra-Thin Vapor Chamber with Composite Wick for Electronics Thermal Management
by Shiwei Zhang, Haoyi Huang, Jingjing Bai, Caiman Yan, Huarong Qiu, Yong Tang and Fangqiong Luo
Micromachines 2024, 15(5), 627; https://doi.org/10.3390/mi15050627 - 7 May 2024
Viewed by 258
Abstract
Ultra-thin vapor chambers (UTVCs) are widely used to cool high-power electronics due to their excellent thermal conductivity. In this study, a UTVC of 82 mm × 58 mm × 0.39 mm with composite wick was prepared. The composite wick is composed of two [...] Read more.
Ultra-thin vapor chambers (UTVCs) are widely used to cool high-power electronics due to their excellent thermal conductivity. In this study, a UTVC of 82 mm × 58 mm × 0.39 mm with composite wick was prepared. The composite wick is composed of two layers of copper mesh and multiple spiral-woven meshes (SWMs), and the composite wick was applied in UTVC to improve liquid replenishment performance and temperature uniformity. Furthermore, the thermal performance of UTVCs with different support column diameters, filling ratios (FRs), and SWM structures was experimentally studied. The results found that the equivalent thermal conductivity (ETC) decreases as the diameter of the support column increases; the UTVC with 0.5 mm support column diameter has the highest ETC, at 3473 W/(m·K). Then, the effect of FR on the heat transfer performance of UTVCs with SWM numbers of 0, 1, 2, and 3 (0 SWMs, 1 SWM, 2 SWMs, 3 SWMs) is consistent, the 30% FR UTVC with 3 SWMs having the highest ETC, at 3837 W/(m·K). Finally, the increased number of SWMs can significantly improve the ultimate power of the UTVCs, the UTVC with 3 SWMs having the highest ultimate power, at 26 W. The above experimental studies indicate that the designed and manufactured UTVCs have great potential advantages in thermal dissipation for electronics. Full article
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32 pages, 9591 KiB  
Review
Progress in Research on White Organic Light-Emitting Diodes Based on Ultrathin Emitting Layers
by Wencheng Zhao, Xiaolin Hu, Fankang Kong, Jihua Tang, Duxv Yan, Jintao Wang, Yuru Liu, Yuanping Sun, Ren Sheng and Ping Chen
Micromachines 2024, 15(5), 626; https://doi.org/10.3390/mi15050626 - 7 May 2024
Viewed by 255
Abstract
White organic light-emitting diodes (WOLEDs) hold vast prospects in the fields of next-generation displays and solid-state lighting. Ultrathin emitting layers (UEMLs) have become a research hotspot because of their unique advantage. On the basis of simplifying the device structure and preparation process, they [...] Read more.
White organic light-emitting diodes (WOLEDs) hold vast prospects in the fields of next-generation displays and solid-state lighting. Ultrathin emitting layers (UEMLs) have become a research hotspot because of their unique advantage. On the basis of simplifying the device structure and preparation process, they can achieve electroluminescent performance comparable to that of doped devices. In this review, we first discuss the working principles and advantages of WOLEDs based on UEML architecture, which can achieve low cost and more flexibility by simplifying the device structure and preparation process. Subsequently, the successful applications of doping and non-doping technologies in fluorescent, phosphorescent, and hybrid WOLEDs combined with UEMLs are discussed, and the operation mechanisms of these WOLEDs are emphasized briefly. We firmly believe that this article will bring new hope for the development of UEML-based WOLEDs in the future. Full article
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25 pages, 3990 KiB  
Review
Underground Ink: Printed Electronics Enabling Electrochemical Sensing in Soil
by Kuan-Yu Chen, Jeneel Kachhadiya, Sharar Muhtasim, Shuohao Cai, Jingyi Huang and Joseph Andrews
Micromachines 2024, 15(5), 625; https://doi.org/10.3390/mi15050625 - 7 May 2024
Viewed by 349
Abstract
Improving agricultural production relies on the decisions and actions of farmers and land managers, highlighting the importance of efficient soil monitoring techniques for better resource management and reduced environmental impacts. Despite considerable advancements in soil sensors, their traditional bulky counterparts cause difficulty in [...] Read more.
Improving agricultural production relies on the decisions and actions of farmers and land managers, highlighting the importance of efficient soil monitoring techniques for better resource management and reduced environmental impacts. Despite considerable advancements in soil sensors, their traditional bulky counterparts cause difficulty in widespread adoption and large-scale deployment. Printed electronics emerge as a promising technology, offering flexibility in device design, cost-effectiveness for mass production, and a compact footprint suitable for versatile deployment platforms. This review overviews how printed sensors are used in monitoring soil parameters through electrochemical sensing mechanisms, enabling direct measurement of nutrients, moisture content, pH value, and others. Notably, printed sensors address scalability and cost concerns in fabrication, making them suitable for deployment across large crop fields. Additionally, seamlessly integrating printed sensors with printed antenna units or traditional integrated circuits can facilitate comprehensive functionality for real-time data collection and communication. This real-time information empowers informed decision-making, optimizes resource management, and enhances crop yield. This review aims to provide a comprehensive overview of recent work related to printed electrochemical soil sensors, ultimately providing insight into future research directions that can enable widespread adoption of precision agriculture technologies. Full article
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16 pages, 5323 KiB  
Communication
An AlScN Piezoelectric Micromechanical Ultrasonic Transducer-Based Power-Harvesting Device for Wireless Power Transmission
by Junxiang Li, Yunfei Gao, Zhixin Zhou, Qiang Ping, Lei Qiu and Liang Lou
Micromachines 2024, 15(5), 624; https://doi.org/10.3390/mi15050624 - 6 May 2024
Viewed by 364
Abstract
Ultrasonic wireless power transfer technology (UWPT) represents a key technology employed for energizing implantable medical devices (IMDs). In recent years, aluminum nitride (AlN) has gained significant attention due to its biocompatibility and compatibility with complementary metal-oxide-semiconductor (CMOS) technology. In the meantime, the integration [...] Read more.
Ultrasonic wireless power transfer technology (UWPT) represents a key technology employed for energizing implantable medical devices (IMDs). In recent years, aluminum nitride (AlN) has gained significant attention due to its biocompatibility and compatibility with complementary metal-oxide-semiconductor (CMOS) technology. In the meantime, the integration of scandium-doped aluminum nitride (Al90.4%Sc9.6%N) is an effective solution to address the sensitivity limitations of AlN material for both receiving and transmission capabilities. This study focuses on developing a miniaturized UWPT receiver device based on AlScN piezoelectric micro-electromechanical transducers (PMUTs). The proposed receiver features a PMUT array of 2.8 × 2.8 mm2 comprising 13 × 13 square elements. An acoustic matching gel is applied to address acoustic impedance mismatch when operating in liquid environments. Experimental evaluations in deionized water demonstrated that the power transfer efficiency (PTE) is up to 2.33%. The back-end signal processing circuitry includes voltage-doubling rectification, energy storage, and voltage regulation conversion sections, which effectively transform the generated AC signal into a stable 3.3 V DC voltage output and successfully light a commercial LED. This research extends the scope of wireless charging applications and paves the way for further device miniaturization by integrating all system components into a single chip in future implementations. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications)
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26 pages, 3604 KiB  
Article
Structure Design and Heat Transfer Performance Analysis of a Novel Composite Phase Change Active Cooling Channel Wall for Hypersonic Aircraft
by Weichen Li, Jieliang Zhao, Xiangbing Wu, Lulu Liang, Wenzhong Wang and Shaoze Yan
Micromachines 2024, 15(5), 623; https://doi.org/10.3390/mi15050623 - 6 May 2024
Viewed by 411
Abstract
Efficient and stable heat dissipation structure is crucial for improving the convective heat transfer performance of thermal protection systems (TPSs) for hypersonic aircraft. However, the heat dissipation wall of the current TPS is limited by a single material and structure, inefficiently dissipating the [...] Read more.
Efficient and stable heat dissipation structure is crucial for improving the convective heat transfer performance of thermal protection systems (TPSs) for hypersonic aircraft. However, the heat dissipation wall of the current TPS is limited by a single material and structure, inefficiently dissipating the large amount of accumulated heat generated during the high-speed maneuvering flight of hypersonic aircraft. Here, a convection cooling channel structure of TPS is proposed, which is an innovative multi-level structure inspired by the natural honeycomb. An active cooling channel (PCM-HC) is designed by using a variable-density topology optimization method and filled with phase change material (PCM). Numerical simulations are used to investigate the thermal performance of the PCM-HC wall, focusing on the influence of PCM properties, structural geometric parameters, and PCM types on heat transfer characteristics. The results demonstrate that the honeycomb-like convection cooling channel wall, combined with PCM latent heat of phase change, exhibits superior heat dissipation capability. With a heat flux input of 50 kW/m2, the maximum temperature on the inner wall of PCM-HC is reduced by 12 K to 20 K. Different PCMs have opposing effects on heat transfer performance due to their distinct thermophysical properties. This work can provide a theoretical basis for the design of high-efficiency cooling channel, improving the heat dissipation performance in the TPS of hypersonic aircraft. Full article
(This article belongs to the Special Issue Heat Transfer and Fluid Flow in Microstructures)
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17 pages, 4190 KiB  
Article
From Formulation to Application: Effects of Plasticizer on the Printability of Fluoro Elastomer Compounds and Additive Manufacturing of Specialized Seals
by Mookkan Periyasamy, AA Mubasshir, Stiven Kodra, Sangeetham Chandramouli, Ronald Campbell, David O. Kazmer and Joey L. Mead
Micromachines 2024, 15(5), 622; https://doi.org/10.3390/mi15050622 - 5 May 2024
Viewed by 414
Abstract
This work investigated material extrusion additive manufacturing (MatEx AM) of specialized fluoroelastomer (FKM) compounds for applications in rubber seals and gaskets. The influence of a commercially available perfluoropolyether (PFPE) plasticizer on the printability of a control FKM rubber compound was studied using a [...] Read more.
This work investigated material extrusion additive manufacturing (MatEx AM) of specialized fluoroelastomer (FKM) compounds for applications in rubber seals and gaskets. The influence of a commercially available perfluoropolyether (PFPE) plasticizer on the printability of a control FKM rubber compound was studied using a custom-designed ram material extruder, Additive Ram Material Extruder (ARME), for printing fully compounded thermoset elastomers. The plasticizer’s effectiveness was assessed based on its ability to address challenges such as high compound viscosity and post-print shrinkage, as well as its impact on interlayer adhesion. The addition of the PFPE plasticizer significantly reduced the FKM compound’s viscosity (by 70%) and post-print shrinkage (by 65%). While the addition of the plasticizer decreased the tensile strength of the control compound, specimens printed with the plasticized FKM retained 34% of the tensile strength of compression-molded samples, compared to only 23% for the unplasticized compound. Finally, the feasibility of seals and gaskets manufacturing using both conventional and unconventional additive manufacturing (AM) approaches was explored. A hybrid method combining AM and soft tooling for compression molding emerged as the optimal method for seal and gasket fabrication. Full article
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11 pages, 7630 KiB  
Communication
Influence of Surface Treatments on Urea Detection Using Si Electrolyte-Gated Transistors with Different Gate Electrodes
by Wonyeong Choi, Seonghwan Shin, Jeonghyeon Do, Jongmin Son, Kihyun Kim and Jeong-Soo Lee
Micromachines 2024, 15(5), 621; https://doi.org/10.3390/mi15050621 - 5 May 2024
Viewed by 372
Abstract
We investigated the impact of surface treatments on Si-based electrolyte-gated transistors (EGTs) for detecting urea. Three types of EGTs were fabricated with distinct gate electrodes (Ag, Au, Pt) using a top-down method. These EGTs exhibited exceptional intrinsic electrical properties, including a low subthreshold [...] Read more.
We investigated the impact of surface treatments on Si-based electrolyte-gated transistors (EGTs) for detecting urea. Three types of EGTs were fabricated with distinct gate electrodes (Ag, Au, Pt) using a top-down method. These EGTs exhibited exceptional intrinsic electrical properties, including a low subthreshold swing of 80 mV/dec, a high on/off current ratio of 106, and negligible hysteresis. Three surface treatment methods ((3-amino-propyl) triethoxysilane (APTES) and glutaraldehyde (GA), 11-mercaptoundecanoic acid (11-MUA), 3-mercaptopropionic acid (3-MPA)) were individually applied to the EGTs with different gate electrodes (Ag, Au, Pt). Gold nanoparticle binding tests were performed to validate the surface functionalization. We compared their detection performance of urea and found that APTES and GA exhibited the most superior detection characteristics, followed by 11-MUA and 3-MPA, regardless of the gate metal. APTES and GA, with the highest pKa among the three surface treatment methods, did not compromise the activity of urease, making it the most suitable surface treatment method for urea sensing. Full article
(This article belongs to the Special Issue CMOS Biosensor and Bioelectronic)
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