Journal Description
Micromachines
Micromachines
is a peer-reviewed, open access journal on the science and technology of small structures, devices and systems, published monthly online by MDPI.
- Open Access— free for readers, with article processing charges (APC) paid by authors or their institutions.
- High Visibility: indexed within Scopus, SCIE (Web of Science), PubMed, PMC, Ei Compendex, dblp, and other databases.
- Journal Rank: JCR - Q2 (Chemistry, Analytical) / CiteScore - Q2 (Mechanical Engineering)
- Rapid Publication: manuscripts are peer-reviewed and a first decision is provided to authors approximately 16.1 days after submission; acceptance to publication is undertaken in 1.9 days (median values for papers published in this journal in the second half of 2023).
- Recognition of Reviewers: reviewers who provide timely, thorough peer-review reports receive vouchers entitling them to a discount on the APC of their next publication in any MDPI journal, in appreciation of the work done.
- Testimonials: See what our editors and authors say about Micromachines.
Impact Factor:
3.4 (2022);
5-Year Impact Factor:
3.3 (2022)
Latest Articles
Synthesis and Characterization of 2D Ternary Compound TMD Materials Ta3VSe8
Micromachines 2024, 15(5), 591; https://doi.org/10.3390/mi15050591 (registering DOI) - 28 Apr 2024
Abstract
Two-dimensional (2D) transition metal dichalcogenides (TMDs) are garnering considerable scientific interest, prompting discussion regarding their prospective applications in the fields of nanoelectronics and spintronics while also fueling groundbreaking discoveries in phenomena such as the fractional quantum anomalous Hall effect (FQAHE) and exciton dynamics.
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Two-dimensional (2D) transition metal dichalcogenides (TMDs) are garnering considerable scientific interest, prompting discussion regarding their prospective applications in the fields of nanoelectronics and spintronics while also fueling groundbreaking discoveries in phenomena such as the fractional quantum anomalous Hall effect (FQAHE) and exciton dynamics. The abundance of binary compound TMDs, such as MX2 (M = Mo, W; X = S, Se, Te), has unlocked myriad avenues of exploration. However, the exploration of ternary compound TMDs remains relatively limited, with notable examples being Ta2NiS5 and Ta2NiSe5. In this study, we report the synthesis of a new 2D ternary compound TMD materials, Ta3VSe8, employing the chemical vapor transport (CVT) method. The as-grown bulk crystal is shiny and can be easily exfoliated. The crystal quality and structure are verified by X-ray diffraction (XRD), while the surface morphology, stoichiometric ratio, and uniformity are determined by scanning electron microscopy (SEM). Although the phonon property is found stable at different temperatures, magneto-resistivity evolves. These findings provide a possible approach for the realization and exploration of ternary compound TMDs.
Full article
(This article belongs to the Special Issue Devices Based on Two-Dimensional Materials: Materials and Fabrication)
Open AccessArticle
Mechanical Characterization of the Erythrocyte Membrane Using a Capacitor-Based Technique
by
Doriana Dorta, Carlos Plazaola, Jafeth Carrasco, Maria F. Alves-Rosa, Lorena M. Coronado, Ricardo Correa, Maytee Zambrano, Braulio Gutiérrez-Medina, Erick Sarmiento-Gómez, Carmenza Spadafora and Guadalupe Gonzalez
Micromachines 2024, 15(5), 590; https://doi.org/10.3390/mi15050590 (registering DOI) - 28 Apr 2024
Abstract
Pathological processes often change the mechanical properties of cells. Increased rigidity could be a marker of cellular malfunction. Erythrocytes are a type of cell that deforms to squeeze through tiny capillaries; changes in their rigidity can dramatically affect their functionality. Furthermore, differences in
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Pathological processes often change the mechanical properties of cells. Increased rigidity could be a marker of cellular malfunction. Erythrocytes are a type of cell that deforms to squeeze through tiny capillaries; changes in their rigidity can dramatically affect their functionality. Furthermore, differences in the homeostatic elasticity of the cell can be used as a tool for diagnosis and even for choosing the adequate treatment for some illnesses. More accurate types of equipment needed to study biomechanical phenomena at the single-cell level are very costly and thus out of reach for many laboratories around the world. This study presents a simple and low-cost technique to study the rigidity of red blood cells (RBCs) through the application of electric fields in a hand-made microfluidic chamber that uses a capacitor principle. As RBCs are deformed with the application of voltage, cells are observed under a light microscope. From mechanical force vs. deformation data, the elastic constant of the cells is determined. The results obtained with the capacitor-based method were compared with those obtained using optical tweezers, finding good agreement. In addition, P. falciparum-infected erythrocytes were tested with the electric field applicator. Our technique provides a simple means of testing the mechanical properties of individual cells.
Full article
(This article belongs to the Special Issue Measurement and Standardization in Microfluidic Devices: Fabrication and Testing)
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Open AccessArticle
A Micro Bridge-Wing-Thickened Low-Energy Exploding Foil Initiator Chip
by
Pengfei Xue, Heng Hu, Tao Wang, Peng Xiong, Mingyu Li and Qingxuan Zeng
Micromachines 2024, 15(5), 589; https://doi.org/10.3390/mi15050589 (registering DOI) - 28 Apr 2024
Abstract
To enhance the energy efficiency of exploding foil initiator systems (EFIs) and mitigate energy loss due to ablation in the bridge-wing regions, a low-energy bridge-wing-thickened EFI chip was designed and fabricated. Computational analysis revealed that increasing the thickness of the bridge flanks significantly
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To enhance the energy efficiency of exploding foil initiator systems (EFIs) and mitigate energy loss due to ablation in the bridge-wing regions, a low-energy bridge-wing-thickened EFI chip was designed and fabricated. Computational analysis revealed that increasing the thickness of the bridge flanks significantly reduces ablation within the bridge region during the electrical explosion. The refinement of the design led to the adoption of a bridge flank thickness of 19 μm, with the bridge area dimensions specified as 0.25 mm × 0.25 mm × 4 μm. This bridge-wing-thickened EFI chip was produced by employing micro-electro-mechanical systems (MEMS) technology and underwent rigorous performance evaluations. The empirical results closely matched the computational predictions, thereby corroborating the precision of the proposed model in simulating the temperature distribution seen during the explosion process. Notably, this enhanced EFI design achieves a flyer velocity of 3800 m/s at a condition of 900 V/0.22 μF, signifying a significant advancement in EFI system efficiency and performance.
Full article
(This article belongs to the Section E:Engineering and Technology)
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Open AccessArticle
A Novel Dual-Band Circularly Polarized Wearable Antenna
by
Yu Dong, Hong Lu and Xing Chen
Micromachines 2024, 15(5), 588; https://doi.org/10.3390/mi15050588 (registering DOI) - 28 Apr 2024
Abstract
A circularly polarized wearable antenna operating in the 2.45/5.8 GHz ISM dual bands is proposed, which consists of a coplanar waveguide-fed rectangular monopole antenna and two parasitic branches. The monopole rectangular radiation patch can generate 2.45 and 7 GHz frequency bands and has
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A circularly polarized wearable antenna operating in the 2.45/5.8 GHz ISM dual bands is proposed, which consists of a coplanar waveguide-fed rectangular monopole antenna and two parasitic branches. The monopole rectangular radiation patch can generate 2.45 and 7 GHz frequency bands and has linear polarization characteristics. By adding L-shaped parasitic branches and L-like grounded branches on both sides of the monopole, the 7 GHz operating frequency band can be moved to the 5.8 GHz frequency band, and circular polarization characteristics can be achieved in both the 2.45 and 5.8 GHz frequency bands. The size of the antenna is 48.7 mm × 42.1 mm × 1.016 mm. The simulated −10 dB impedance bandwidths of the antenna are 1.8–2.66 GHz and 5.48–6.98 GHz, respectively. The 3 dB axial ratio bandwidths are 2.34–2.67 GHz and 5.58–6.39 GHz, respectively, and it has dual-band circular polarization characteristics. In addition, the radiation characteristics of the antenna and its safety performance near the human body were analyzed. The antenna prototype has been constructed, and the measurement and simulation results have good consistency. The proposed antenna is suitable for application in wearable devices.
Full article
(This article belongs to the Special Issue Advanced Antenna System: Structural Analysis, Design and Application)
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Open AccessArticle
Motor Behavior Regulation of Rat Robots Using Integrated Electrodes Stimulated by Micro-Nervous System
by
Jiabing Huo, Le Zhang, Xiangyu Luo, Yongkang Rao, Peili Cao, Xiaojuan Hou, Jian He, Jiliang Mu, Wenping Geng, Haoran Cui, Rui Cheng and Xiujian Chou
Micromachines 2024, 15(5), 587; https://doi.org/10.3390/mi15050587 (registering DOI) - 28 Apr 2024
Abstract
As a cutting-edge technology, animal robots based on living organisms are being extensively studied, with potential for diverse applications in the fields of neuroscience, national security, and civil rescue. However, it remains a significant challenge to reliably control the animal robots with the
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As a cutting-edge technology, animal robots based on living organisms are being extensively studied, with potential for diverse applications in the fields of neuroscience, national security, and civil rescue. However, it remains a significant challenge to reliably control the animal robots with the objective of protecting their long-term survival, and this has seriously hindered their practical implementation. To address this issue, this work explored the use of a bio-friendly neurostimulation system that includes integrated stimulation electrodes together with a remote wireless stimulation circuit to control the moving behavior of rat robots. The integrated electrodes were implanted simultaneously in four stimulation sites, including the medial forebrain bundle (MFB) and primary somatosensory cortex, barrel field (S1BF). The control system was able to provide flexibility in adjusting the following four stimulation parameters: waveform, amplitude, frequency, and duration time. The optimized parameters facilitated the successful control of the rat’s locomotion, including forward movement and left and right turns. After training for a few cycles, the rat robots could be guided along a designated route to complete the given mission in a maze. Moreover, it was found that the rat robots could survive for more than 20 days with the control system implanted. These findings will ensure the sustained and reliable operation of the rat robots, laying a robust foundation for advances in animal robot regulation technology.
Full article
(This article belongs to the Collection Women in Micromachines)
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Open AccessArticle
Design, Fabrication, and Characterization of a Planar Three-Electrode Trigger Switch Based on Flexible Printed Circuit Process
by
Pengfei Xue, Peng Xiong, Heng Hu, Tao Wang, Mingyu Li and Qingxuan Zeng
Micromachines 2024, 15(5), 586; https://doi.org/10.3390/mi15050586 (registering DOI) - 28 Apr 2024
Abstract
An exploding foil initiator system (EFIs) is essential in modern weaponry for its safety and reliability. As the main component of EFIs, the performance of the switch is critical to EFIs. In this study, a planar three-electrode trigger switch was designed and fabricated
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An exploding foil initiator system (EFIs) is essential in modern weaponry for its safety and reliability. As the main component of EFIs, the performance of the switch is critical to EFIs. In this study, a planar three-electrode trigger switch was designed and fabricated using the Flexible Printed Circuits (FPC) process. Subsequently, the performance of the FPC switch was tested. The results show that the self-breakdown voltage of the FPC switch is stable. In addition, an FPF switch with a 0.6 mm main electrode gap demonstrated consistency, with delay times below 31.75 ns, and a jitter ranging from 1.7 ns to 10.94 ns at 900 V to 1200 V, evidencing the FPC switches’ reliability and uniform performance across various voltages. Compared to the Micro-Electro-Mechanical Systems (MEMS) switches of similar dimensions, the FPC switches achieved a faster high-current attainment with less inductance, showing a 5% reduction in loop inductance. The repetitive testing results demonstrate that the FPC switch maintains consistent output performance, with stable peak currents, peak current time, and delay time over 50 action cycles, highlighting its repeatability. The FPC switch was assembled with an EFI chip and capacitor into an integrated system, which was subsequently able to successfully detonate HNS-IV at 1000 V/0.22 μF, proving the FPC switch’s potential in low inductance applications.
Full article
(This article belongs to the Section E:Engineering and Technology)
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Open AccessArticle
Band 40/41 Surface Acoustic Wave Filters on 42°YX-Lithium Tantalate Substrate with Suppression of Transverse Leakage
by
Qiang Xiao, Zihang Gao, Mengqun Chu, Zeyu Zheng, Xuesong Du, Chengji Hu, Hongzhi Pan, Hualin Li, Jiahe Dong, Zhenglin Chen, Huazhi Chen, Chuan Lu, Mi Tang, Yanping Fan and Jinyi Ma
Micromachines 2024, 15(5), 585; https://doi.org/10.3390/mi15050585 (registering DOI) - 28 Apr 2024
Abstract
The transverse leakage of leaky surface acoustic waves (LSAWs) occurs on 42°YX-lithium tantalate substrates (42LT), which increases the insertion loss, narrows the bandwidth and flattens the roll-off of band 40/41 SAW filters and duplexers. In this work, LSAW characteristics with different metal materials
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The transverse leakage of leaky surface acoustic waves (LSAWs) occurs on 42°YX-lithium tantalate substrates (42LT), which increases the insertion loss, narrows the bandwidth and flattens the roll-off of band 40/41 SAW filters and duplexers. In this work, LSAW characteristics with different metal materials and thicknesses are calculated by the finite element method (FEM), which determines the IDT material and thickness used for band 40/41 SAW filter design. To deeply understand transverse leakage and suppress it, the effects of different gap and dummy lengths on transverse leakage are simulated and discussed. Then, a new technique of using a wider dummy without any additional lithographic or depositing processes is proposed to suppress the leakage. Its effectiveness is validated by both simulations and experiments. Then, the technique is extended to applications of band 40 and 41 SAW filters. The experimental results show that with the wider dummy structure, the band 40 and 41 SAW filters achieve a more than 0.2 dB improvement in the insertion loss, a wider bandwidth and a steeper roll-off characteristic. This technique may also be extended to the other band SAW filter applications.
Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Resonators: Materials, Design and Fabrication)
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Open AccessArticle
A Dual-Band 8-Antenna Array Design for 5G/WiFi 5 Metal-Frame Smartphone Applications
by
Huiyang Li, Shanshan Xiao, Lefei He, Qibo Cai and Gui Liu
Micromachines 2024, 15(5), 584; https://doi.org/10.3390/mi15050584 (registering DOI) - 28 Apr 2024
Abstract
This paper presents a dual-band 8-port multiple-input multiple-output (MIMO) antenna specifically designed for fifth-generation (5G) smartphones, featuring two open-slot metal frames. To enhance impedance matching and improve isolation between adjacent antenna elements, each antenna element employed a coupling feed. All simulation results in
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This paper presents a dual-band 8-port multiple-input multiple-output (MIMO) antenna specifically designed for fifth-generation (5G) smartphones, featuring two open-slot metal frames. To enhance impedance matching and improve isolation between adjacent antenna elements, each antenna element employed a coupling feed. All simulation results in this paper come from Ansys HFSS. The operational frequency bands of the proposed antenna spanned 3.36–4.2 GHz for the lower band and 4.37–5.95 GHz for the higher band, covering 5G New Radio (NR) bands N78 (3.4–3.6 GHz) and N79 (4.4–4.9 GHz), as well as WiFi 5 (5.15–5.85 GHz). Notably, the antenna demonstrated outstanding isolation exceeding 16.5 dB within the specified operating bands. The exceptional performance positions the proposed antenna as a promising candidate for integration into 5G metal-frame smartphones.
Full article
(This article belongs to the Special Issue Recent Advancements in Flexible, Reconfigurable and Wearable Antennas for 5G and Beyond)
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Open AccessArticle
Effect of Geometrical Parameters on the Mechanical Performance of Bamboo-Inspired Gradient Hollow-Strut Octet Lattice Structure Fabricated by Additive Manufacturing
by
Junxian Ge, Yu Song, Zhenyu Chen, Yuhao Zhuo, Tongzheng Wei, Chen Ge, Yuang Cheng, Ming Liu and Qingbo Jia
Micromachines 2024, 15(5), 583; https://doi.org/10.3390/mi15050583 (registering DOI) - 28 Apr 2024
Abstract
Hollow-strut metal lattice structures are currently attracting extensive attention due to their excellent mechanical performance. Inspired by the node structure of bamboo, this study aimed to investigate the mechanical performance of the gradient hollow-strut octet lattice structure fabricated by laser powder bed fusion
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Hollow-strut metal lattice structures are currently attracting extensive attention due to their excellent mechanical performance. Inspired by the node structure of bamboo, this study aimed to investigate the mechanical performance of the gradient hollow-strut octet lattice structure fabricated by laser powder bed fusion (LPBF). The effect of geometrical parameters on the yield strength, Young’s modulus and energy absorption of the designed octet unit cells were studied and optimized by FEA analysis. The hollow-strut geometrical parameters that deliver the best mechanical property combinations were identified, and the corresponding unit cells were then redesigned into the 3 × 3 × 3 type lattice structures for experimental evaluations. Compression tests confirmed that the designed gradient hollow-strut octet lattice structures demonstrated superior mechanical properties and deformation stability than their solid-strut lattice structure counterparts. The underlying deformation mechanism analysis revealed that the remarkably enhanced bending strength of the gradient hollow-strut lattice structure made significant contributions to its mechanical performance improvement. This study is envisaged to shed light on future hollow-strut metal lattice structure design for lightweight applications, with the final aim of enhancing the component’s mechanical properties and/or lowering its density as compared with the solid-strut lattice structures.
Full article
(This article belongs to the Special Issue Advanced Additive Manufacturing Techniques: From Fundamental Research to Applications)
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Open AccessArticle
A Novel Low-Temperature Extrusion Method for the Fused Filament Fabrication of Fluoroelastomer Compounds
by
Mookkan Periyasamy, Ronald Campbell, Joey M. Mead, David O. Kazmer, ShibShankar Banerjee, AA Mubasshir, Leeda A. Phaen and Stiven Kodra
Micromachines 2024, 15(5), 582; https://doi.org/10.3390/mi15050582 (registering DOI) - 27 Apr 2024
Abstract
In this work, an additive manufacturing process for extruding fully compounded thermosetting elastomers based on fluorine-containing polymer compositions is reported. Additive manufacturing printers are designed with a dry ice container to precool filaments made from curable fluoroelastomer (FKM) and perfluoroelastomer (FFKM) compounds. A
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In this work, an additive manufacturing process for extruding fully compounded thermosetting elastomers based on fluorine-containing polymer compositions is reported. Additive manufacturing printers are designed with a dry ice container to precool filaments made from curable fluoroelastomer (FKM) and perfluoroelastomer (FFKM) compounds. A support tube guides the stiffened filament towards the printer nozzle. This support tube extends near the inlet to a printer nozzle. This approach allows low-modulus, uncured rubber filaments to be printed without buckling, a phenomenon common when 3D printing low-modulus elastomers via the fused deposition modeling (FDM) process. Modeling studies using thermal analyses data from a Dynamic Mechanical Analyzer (DMA) and a Differential Scanning Calorimeter (DSC) are used to calculate the Young’s modulus and buckling force, which helps us to select the appropriate applied pressure and the nozzle size for printing. Using this additive manufacturing (AM) method, the successful printing of FKM and FFKM compounds is demonstrated. This process can be used for the future manufacturing of seals or other parts from fluorine-containing polymers.
Full article
(This article belongs to the Special Issue Advanced Additive Manufacturing Techniques: From Fundamental Research to Applications)
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Open AccessArticle
Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester
by
Jin Gu Kang, Hyeukgyu Kim, Sangwoo Shin and Beom Seok Kim
Micromachines 2024, 15(5), 581; https://doi.org/10.3390/mi15050581 (registering DOI) - 27 Apr 2024
Abstract
We introduce a micro-electromechanical system (MEMS) energy harvester, designed for capturing flow energy. Moving beyond traditional vibration-based energy harvesting, our approach incorporates a cylindrical oscillator mounted on an MEMS chip, effectively harnessing wind energy through flow-induced vibration (FIV). A highlight of our research
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We introduce a micro-electromechanical system (MEMS) energy harvester, designed for capturing flow energy. Moving beyond traditional vibration-based energy harvesting, our approach incorporates a cylindrical oscillator mounted on an MEMS chip, effectively harnessing wind energy through flow-induced vibration (FIV). A highlight of our research is the development of a comprehensive fabrication process, utilizing a 5.00 µm thick cantilever beam and piezoelectric film, optimized through advanced micromachining techniques. This process ensures the harvester’s alignment with theoretical predictions and enhances its operational efficiency. Our wind tunnel experiments confirmed the harvester’s capability to generate a notable electrical output, with a peak voltage of 2.56 mV at an 8.00 m/s wind speed. Furthermore, we observed a strong correlation between the experimentally measured voltage frequencies and the lift force frequency observed by CFD analysis, with dominant frequencies identified in the range of 830 Hz to 867 Hz, demonstrating the potential application in actual flow environments. By demonstrating the feasibility of efficient energy conversion from ambient wind, our research contributes to the development of sustainable energy solutions and low-power wireless electron devices.
Full article
(This article belongs to the Special Issue MEMS Nano/Microfabrication)
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Open AccessArticle
A Silicon-Based ROTE Sensor for High-Q and Label-Free Carcinoembryonic Antigen Detection
by
Luxiao Sang, Haojie Liang, Biao Zhao, Runze Shi, Aoqun Jian and Shengbo Sang
Micromachines 2024, 15(5), 580; https://doi.org/10.3390/mi15050580 (registering DOI) - 27 Apr 2024
Abstract
This paper presents a biosensor based on the resonant optical tunneling effect (ROTE) for detecting a carcinoembryonic antigen (CEA). In this design, sensing is accomplished through the interaction of the evanescent wave with the CEA immobilized on the sensor’s surface. When CEA binds
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This paper presents a biosensor based on the resonant optical tunneling effect (ROTE) for detecting a carcinoembryonic antigen (CEA). In this design, sensing is accomplished through the interaction of the evanescent wave with the CEA immobilized on the sensor’s surface. When CEA binds to the anti-CEA, it alters the effective refractive index (RI) on the sensor’s surface, leading to shifts in wavelength. This shift can be identified through the cascade coupling of the FP cavity and ROTE cavity in the same mode. Experimental results further show that the shift in resonance wavelength increases with the concentration of CEA. The biosensor responded linearly to CEA concentrations ranging from 1 to 5 ng/mL with a limit of detection (LOD) of 0.5 ng/mL and a total Q factor of 9500. This research introduces a new avenue for identifying biomolecules and cancer biomarkers, which are crucial for early cancer detection.
Full article
(This article belongs to the Section A:Physics)
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Open AccessArticle
Dual-Criteria Decision Analysis by Multiphotonic Effects in Nanostructured ZnO
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Victor Manuel Garcia-de-los-Rios, Jose Alberto Arano-Martinez, Martin Trejo-Valdez, Mónica Araceli Vidales-Hurtado, Gina Gallegos-García and Carlos Torres-Torres
Micromachines 2024, 15(5), 579; https://doi.org/10.3390/mi15050579 (registering DOI) - 27 Apr 2024
Abstract
Simultaneous interrogation of pump and probe beams interacting in ZnO nanostructures of a two-wave mixing is proposed for dual-path data processing of optical signals by nonlinear optical effects. An enhancement in third-order nonlinear optical properties was exhibited by Al-doped ZnO thin films. Multiphoton
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Simultaneous interrogation of pump and probe beams interacting in ZnO nanostructures of a two-wave mixing is proposed for dual-path data processing of optical signals by nonlinear optical effects. An enhancement in third-order nonlinear optical properties was exhibited by Al-doped ZnO thin films. Multiphoton absorption and nonlinear refraction were explored by the z-scan technique at 532 nm with nanosecond pulses. The evolution of the optical Kerr effect in the ZnO thin films was analyzed as a function of the incorporation of Al in the sample by a vectorial two-wave mixing method. Electrical and photoconductive effects were evaluated to further characterize the influence of Al in the ZnO solid samples. Potential applications of nonlinear optical parameters for encoding and encrypting information in light can be envisioned.
Full article
(This article belongs to the Special Issue Nanomaterials Photonics)
Open AccessArticle
A Time-to-Digital Converter for Low-Power Consumption Single Slope Analog-to-Digital Converters in a High-Speed CMOS Image Sensor
by
Ziyi Li and Zhiyuan Gao
Micromachines 2024, 15(5), 578; https://doi.org/10.3390/mi15050578 (registering DOI) - 27 Apr 2024
Abstract
To reduce the power consumption of a TDC in high-speed applications, a TDC architecture applied to SS ADC is proposed to reduce redundant counting. This structure can remove the identical part between two rows of pixel signals in a CMOS image sensor by
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To reduce the power consumption of a TDC in high-speed applications, a TDC architecture applied to SS ADC is proposed to reduce redundant counting. This structure can remove the identical part between two rows of pixel signals in a CMOS image sensor by adjusting the start and stop signal of the TDC, which will reduce the number of flipping of D flip-flops in the TDC. This structure requires the simultaneous readout of two rows of pixels in the high-speed CMOS image sensor. In the 110 nm CMOS process, simulation results show that the designed 5-bit TDC achieves an effective number of bits (ENOB) at 4.72 bits and a figure-of-merit (FOM) at 104.7–162.3 fJ/step, with a power consumption ranging from 60 µW to 93 µW. Compared with traditional counting methods, the proposed TDC can reduce counting power consumption by 30%.
Full article
(This article belongs to the Section A:Physics)
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A Survey of MPSoC Management toward Self-Awareness
by
Guillermo Gonzalez-Martinez, Remberto Sandoval-Arechiga, Luis Octavio Solis-Sanchez, Laura Garcia-Luciano, Salvador Ibarra-Delgado, Juan Ramon Solis-Escobedo, Jose Ricardo Gomez-Rodriguez and Viktor Ivan Rodriguez-Abdala
Micromachines 2024, 15(5), 577; https://doi.org/10.3390/mi15050577 - 26 Apr 2024
Abstract
Managing Multi-Processor Systems-on-Chip (MPSoCs) is becoming increasingly complex as demands for advanced capabilities rise. This complexity is due to the involvement of more processing elements and resources, leading to a higher degree of heterogeneity throughout the system. Over time, management schemes have evolved
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Managing Multi-Processor Systems-on-Chip (MPSoCs) is becoming increasingly complex as demands for advanced capabilities rise. This complexity is due to the involvement of more processing elements and resources, leading to a higher degree of heterogeneity throughout the system. Over time, management schemes have evolved from simple to autonomous systems with continuous control and monitoring of various parameters such as power distribution, thermal events, fault tolerance, and system security. Autonomous management integrates self-awareness into the system, making it aware of its environment, behavior, and objectives. Self-Aware Cyber-Physical Systems-on-Chip (SA-CPSoCs) have emerged as a concept to achieve highly autonomous management. Communication infrastructure is also vital to SoCs, and Software-Defined Networks-on-Chip (SDNoCs) can serve as a base structure for self-aware systems-on-chip. This paper presents a survey of the evolution of MPSoC management over the last two decades, categorizing research works according to their objectives and improvements. It also discusses the characteristics and properties of SA-CPSoCs and explains why SDNoCs are crucial for these systems.
Full article
Open AccessArticle
Effect of Deposition Pressure and Temperature on Tungsten Thin-Film Heater for Phase-Change Switch Applications
by
Sheng Qu, Jihua Zhang, Libin Gao, Hongwei Chen and Yao Ding
Micromachines 2024, 15(5), 576; https://doi.org/10.3390/mi15050576 - 26 Apr 2024
Abstract
Tungsten (W) film is increasingly utilized in various microheater applications due to its numerous advantages. These advantages include a high melting point, positive constant temperature coefficient of resistance (TCR), good mechanical stability, and compatibility with semiconductor processes. In this paper, deposition parameters for
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Tungsten (W) film is increasingly utilized in various microheater applications due to its numerous advantages. These advantages include a high melting point, positive constant temperature coefficient of resistance (TCR), good mechanical stability, and compatibility with semiconductor processes. In this paper, deposition parameters for enhancing the properties of W film were investigated, and an optimized microheater was fabricated. It was found that the deposition temperature and pressure can modify the TCR to be negative or positive and the crystalline phase of W films to be alpha phases or mixed with beta phases. A W film deposited under 650 °C with a pressure of 1 pa has a positive TCR and pure alpha phase crystalline structure. We applied this optimized W film as a microheater in an RF phase-change switch (RFPCS), and the maximum voltage of the optimized W microheater increased by at least 48% in this work. By optimizing the microheater, the phase-change switch can be successfully actuated in both on and off states, demonstrated by the Raman results of the phase-change material. A voltage pulse of 20 V/200 ns was enough to turn the switch off with MΩ, and 11 V/3 μs could turn the switch on with 138 Ω. The optimized microheater and device can cycle 500 times without failure. The insertion loss and isolation of the device at 20 GHz was 1.0 dB and 22 dB.
Full article
(This article belongs to the Special Issue Thin Film Deposition: From Fundamental Research to Applications)
Open AccessArticle
Displacement Mapping as a Highly Flexible Surface Texturing Tool for Additively Photopolymerized Components
by
Robert Bail and Dong Hyun Lee
Micromachines 2024, 15(5), 575; https://doi.org/10.3390/mi15050575 - 26 Apr 2024
Abstract
Displacement mapping is a computer graphics technique that enables the design of components with regularly or randomly textured surfaces that can be quickly materialized on a three-dimensional (3D) printer when needed. This approach is, in principle, more flexible, faster, and more economical compared
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Displacement mapping is a computer graphics technique that enables the design of components with regularly or randomly textured surfaces that can be quickly materialized on a three-dimensional (3D) printer when needed. This approach is, in principle, more flexible, faster, and more economical compared to conventional texturing methods, but the accuracy of the texture depends heavily on the parameters used. The purpose of this study is to demonstrate how to produce a surface-textured part using polygonal (mesh) modeling software and a photopolymerizable resin and to develop a universal methodology to predict the dimensional accuracy of the model file log combined with a resin 3D printer. The printed components were characterized on a scanning confocal microscope. In the setup used in this study, the mesh size had to be reduced to 10% of the smallest feature size, and the textured layer had to be heavily (×4.5) overexposed to achieve the desired accuracy. As a practical application, two functional stamps with a regular (honeycomb) and a random texture, respectively, were successfully manufactured. The insights gained will be of great benefit for quickly and cost-effectively producing components with innovative patterns and textures for a variety of hobby, industrial, and biomedical applications.
Full article
(This article belongs to the Special Issue Stereolithography (SLA) and Digital Light Processing (DLP) for Flexible and Sustainable Micro-Manufacturing)
Open AccessArticle
Characterization of Sand and Dust Pollution Degradation Based on Sensitive Structure of Microelectromechanical System Flow Sensor
by
Jinchuan Chen, Xiao Wen, Qinwen Huang, Wanchun Ren, Ruiwen Liu and Chunhua He
Micromachines 2024, 15(5), 574; https://doi.org/10.3390/mi15050574 - 26 Apr 2024
Abstract
The effect of sand and dust pollution on the sensitive structures of flow sensors in microelectromechanical systems (MEMS) is a hot issue in current MEMS reliability research. However, previous studies on sand and dust contamination have only searched for sensor accuracy degradation due
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The effect of sand and dust pollution on the sensitive structures of flow sensors in microelectromechanical systems (MEMS) is a hot issue in current MEMS reliability research. However, previous studies on sand and dust contamination have only searched for sensor accuracy degradation due to heat conduction in sand and dust cover and have yet to search for other failure-inducing factors. This paper aims to discover the other inducing factors for the accuracy failure of MEMS flow sensors under sand and dust pollution by using a combined model simulation and sample test method. The accuracy of a flow sensor is mainly reflected by the size of its thermistor, so in this study, the output value of the thermistor value was chosen as an electrical characterization parameter to verify the change in the sensor’s accuracy side by side. The results show that after excluding the influence of heat conduction, when sand particles fall on the device, the mutual friction between the sand particles will produce an electrostatic current; through the principle of electrostatic dissipation into the thermistor, the principle of measurement leads to the resistance value becoming smaller, and when the sand dust is stationary for some time, the resistance value returns to the expected level. This finding provides theoretical guidance for finding failure-inducing factors in MEMS failure modes.
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(This article belongs to the Special Issue Selected Papers From the 25th Annual Conference and 14th International Conference of Chinese Society of Micro-Nano Technology (CSMNT 2023))
Open AccessArticle
Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC
by
Yang Hua, Zhenduo Zhang, Jiyu Du, Xiaoliang Liang, Wei Zhang, Yukui Cai and Quanjing Wang
Micromachines 2024, 15(5), 573; https://doi.org/10.3390/mi15050573 - 26 Apr 2024
Abstract
Silicon carbide (SiC) is utilized in the automotive, semiconductor, and aerospace industries because of its desirable characteristics. Nevertheless, the traditional machining method induces surface microcracks, low geometrical precision, and severe tool wear due to the intrinsic high brittleness and hardness of SiC. Femtosecond
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Silicon carbide (SiC) is utilized in the automotive, semiconductor, and aerospace industries because of its desirable characteristics. Nevertheless, the traditional machining method induces surface microcracks, low geometrical precision, and severe tool wear due to the intrinsic high brittleness and hardness of SiC. Femtosecond laser processing as a high-precision machining method offers a new approach to SiC processing. However, during the process of femtosecond laser ablation, temperature redistribution and changes in geometrical morphology features are caused by alterations in carrier density. Therefore, the current study presented a multi-physics model that took carrier density alterations into account to more accurately predict the geometrical morphology for femtosecond laser ablating SiC. The transient nonlinear evolutions of the optical and physical characteristics of SiC irradiated by femtosecond laser were analyzed and the influence of laser parameters on the ablation morphology was studied. The femtosecond laser ablation experiments were performed, and the ablated surfaces were subsequently analyzed. The experimental results demonstrate that the proposed model can effectively predict the geometrical morphology. The predicted error of the ablation diameter is within the range from 0.15% to 7.44%. The predicted error of the ablation depth is within the range from 1.72% to 6.94%. This work can offer a new way to control the desired geometrical morphology of SiC in the automotive, semiconductor, and aerospace industries.
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(This article belongs to the Section D:Materials and Processing)
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Open AccessArticle
A New Type of Hydraulic Clutch with Magnetorheological Fluid: Theory and Experiment
by
Karol Musiałek, Ireneusz Musiałek, Karol Osowski, Artur Olszak, Aneta Mikulska, Zbigniew Kęsy, Andrzej Kęsy and Seung-Bok Choi
Micromachines 2024, 15(5), 572; https://doi.org/10.3390/mi15050572 - 26 Apr 2024
Abstract
This paper presents a new type of hydraulic clutch operating by means of magnetorheological (MR) fluids and the results achieved from both theoretical analysis and experimental measurement. A hydraulic clutch system with MR working fluid and a rotating magnetic field located was designed.
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This paper presents a new type of hydraulic clutch operating by means of magnetorheological (MR) fluids and the results achieved from both theoretical analysis and experimental measurement. A hydraulic clutch system with MR working fluid and a rotating magnetic field located was designed. The clutch was based on the principle of using a rotating magnetic field created by an alternating current electromagnet to set the MR fluid in motion. To test the hydraulic clutch with a rotating magnetic field, MR fluids were produced by our laboratory, consisting of solid iron particles of various diameters mixed with a silicone oil. With MR working fluid and a rotating magnetic core was designed. The rheological properties of the MR fluids were assessed on the basis of tests carried out with a Brookfield DV2T rheometer equipped with a magnetic device for generating a magnetic field. The characteristics of the hydraulic clutch were tested on a specially built test stand. It was found that the torque transmitted by the clutch increased with the rotational speed of the magnetic field and with a lower rotational speed of the beaker in which the working fluid was placed. It was also found that the greatest torque occurred with the working fluid with the highest iron content. Based on the analysis of the structure and characteristics of the clutch in which the magnetic field is used, it has been shown that the design of the developed clutch is similar to that of an induction clutch, and its characteristics correspond to the characteristics of the eddy current clutch. Therefore, the proposed new clutch with MR fluid and rotating magnetic field can be applied to stationary power transmission systems in a manner similar to an eddy current clutch.
Full article
(This article belongs to the Section E:Engineering and Technology)
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