Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
4.7
3.4
Journals
Micromachines
Special Issues
Surface and Bulk Acoustic Wave Resonators: Materials, Design and Fabrication
share announcement

Surface and Bulk Acoustic Wave Resonators: Materials, Design and Fabrication

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: 25 September 2024 | Viewed by 1614

Special Issue Editors

Prof. Dr. Jingfu Bao

E-Mail Website
Guest Editor
School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Interests: RF circuits and system; RF MEMS; acoustic filter; phononic crystal; low-noise oscillator
Prof. Dr. Kenya Hashimoto

E-Mail Website
Guest Editor
School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610056, China
Interests: surface and bulk acoustic wave devices
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues, 

Acoustic wave devices have been extensively used for radio frequency (RF) signal processing in modern wireless communication systems. Modern mobile wireless handsets have many filters. There are one hundred acoustic filters in one terminal in the 5G and 6G communications systems. SAW/BAW filters, including duplexers and multiplexers, are very important devices in mobile terminal systems, and these acoustic devices are small and perform well. There are many kinds of acoustic filter, like TCSAW, XBAR, TFBAR, and IHPSAW, and they are developed using different concepts, like the Y-matrix, reflective array method (RAM), coupling of mode (COM), longitudinally coupled resonator (LCR), and so on. 

Over the last ten years, the micro-acoustic resonator techniques and simulation systems have been improved and perfected, such as the 3D finite element method (3D FEM), hierarchical cascading technique (HCT), and the simulation of nonlinearities, with a high-power handling capacity, as well as filter synthesis. An Advanced Quality Factor Q, large electromechanical coupling factor keff^2, and Temperature Coefficient of Frequency (TCF) are required in some devices. 

To fabricate SAW/BAW devices, some materials like Lithium Tantalate (LiTaO3, LT), Lithium Niobate (LiNbO3, LN) (especially for the substrate), and new Scandium (Sc)-doped AlN materials, and so on, are needed. In order to promote research and advocate for continuous innovation in this field, this Special Issue presents the current state of the art in the field of ‘Surface and Bulk Acoustic Wave Resonators’, covering a wide range of related topics, including, but not limited to, the following: 

  • New resonator structures: IDT, DMS,IHPSAW, Piston, etc.;
  • New methods of material control: angle cut, guide wave structure, etc.;
  • Advanced materials: LT-, LN-, Scandium (Sc)-doped AlN, etc.;
  • Fabricated processes: thinner films, Nano-level accurate fabrication, etc.;
  • Advanced simulations: BEM, FEM, HCT, etc.

In this Special Issue, original research articles and reviews are welcome. We look forward to receiving your contributions. 

Prof. Dr. Jingfu Bao
Prof. Dr. Kenya Hashimoto
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • surface acoustic wave
  • bulk acoustic wave
  • excited bulk acoustic wave resonator (XBAR)
  • 3D finite element method (FEM)
  • resonator
  • temperature coefficient of frequency (TCF)
  • interdigital transducers (IDTs)
  • coupling of mode (COM) model
  • modified Butterworth van Dyke (mBVD)
  • quality factors (Q)
  • acoustic impedance (Z)
  • multiplexer
  • nonlinearity
  • phononic crystal

Published Papers (2 papers)

Download All Papers
Order results
Result details
Show export options expand_more Show export options expand_less
Select all
Export citation of selected articles as:

Research

13 pages, 19144 KiB  
Article
Band 40/41 Surface Acoustic Wave Filters on 42°YX-Lithium Tantalate Substrate with Suppression of Transverse Leakage
by Qiang Xiao, Zihang Gao, Mengqun Chu, Zeyu Zheng, Xuesong Du, Chengji Hu, Hongzhi Pan, Hualin Li, Jiahe Dong, Zhenglin Chen, Huazhi Chen, Chuan Lu, Mi Tang, Yanping Fan and Jinyi Ma
Micromachines 2024, 15(5), 585; https://doi.org/10.3390/mi15050585 - 28 Apr 2024
Viewed by 391
Abstract
The transverse leakage of leaky surface acoustic waves (LSAWs) occurs on 42°YX-lithium tantalate substrates (42LT), which increases the insertion loss, narrows the bandwidth and flattens the roll-off of band 40/41 SAW filters and duplexers. In this work, LSAW characteristics with different metal materials [...] Read more.
The transverse leakage of leaky surface acoustic waves (LSAWs) occurs on 42°YX-lithium tantalate substrates (42LT), which increases the insertion loss, narrows the bandwidth and flattens the roll-off of band 40/41 SAW filters and duplexers. In this work, LSAW characteristics with different metal materials and thicknesses are calculated by the finite element method (FEM), which determines the IDT material and thickness used for band 40/41 SAW filter design. To deeply understand transverse leakage and suppress it, the effects of different gap and dummy lengths on transverse leakage are simulated and discussed. Then, a new technique of using a wider dummy without any additional lithographic or depositing processes is proposed to suppress the leakage. Its effectiveness is validated by both simulations and experiments. Then, the technique is extended to applications of band 40 and 41 SAW filters. The experimental results show that with the wider dummy structure, the band 40 and 41 SAW filters achieve a more than 0.2 dB improvement in the insertion loss, a wider bandwidth and a steeper roll-off characteristic. This technique may also be extended to the other band SAW filter applications. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Resonators: Materials, Design and Fabrication)
►▼ Show Figures

Figure 1

14 pages, 4779 KiB  
Article
Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator
by Mohammed Awad, Temesgen Bailie Workie, Jingfu Bao and Ken-ya Hashimoto
Micromachines 2023, 14(10), 1965; https://doi.org/10.3390/mi14101965 - 22 Oct 2023
Cited by 1 | Viewed by 922
Abstract
This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. [...] Read more.
This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Resonators: Materials, Design and Fabrication)
►▼ Show Figures

Figure 1

Show export options expand_more Show export options expand_less
Select all
Export citation of selected articles as:
 
Displaying articles 1-2
Back to TopTop